OMEGA
DC/RF Magnetron Sputtering, Thermal evaporation, Electron bean evaporation
OMEGA systems are produced in 10 different designs and based on user specification can have either or all deposition techniques of DC/RF magnetron sputtering, thermal evaporation or electron beam evaporation. Its chamber is made of 304-steel and its door is at side for easy access to all parts. Both roughing and backing paths are available with electro-pneumatic valves. A diffusion pump with 700 Lit/s is standard on this system.