SIGMA

DC/RF Sputtering and Thermal evaporation

This system is only used for sputtering and thermal evaporation.  It has a glass chamber and uses a turbo molecular pump instead of diffusion pump as its high vacuum source.  The backing and roughing routs are omitted in this system.  These allows for a relatively small, fast, clean and cost effective experimental vacuum system.

This is our most popular research equipment to date.